9 February 2009 The quantitative assessment of small structure imaging ability by terahertz wave
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In this paper, the imaging ability of terahertz wave in time-domain spectroscopy (THz-TDS) imaging system is assessed by using the step-by-step scan imaging method to four small structures: thread, dots, round hole, and square on the focus of the imaging system. We utilize THz-TDS energy imaging model to acquire the energy distribution of terahertz wave passing through the different small structure, which can be use as a criterion of imaging ability. Theoretically, terahertz imaging technology possesses highly spatial resolution because the size of spot is inversely proportional to the frequency. Our experimental results also show that THz-TDS technology has a preferable spatial resolution on the millimeter scale. In addition, a more delicate and smooth image can be obtained by means of the nearest neighbor interpolation algorithm. A method to measure the size of target is provided. These results are important references for the further terahertz spectroscopy imaging research.
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Kun Yang, Kun Yang, Guozhong Zhao, Guozhong Zhao, Chengsen Liang, Chengsen Liang, Cunlin Zhang, Cunlin Zhang, } "The quantitative assessment of small structure imaging ability by terahertz wave", Proc. SPIE 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration, 71580R (9 February 2009); doi: 10.1117/12.806685; https://doi.org/10.1117/12.806685


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