2 February 2009 The design and analysis of a robust micro-machined vibrating ring gyroscope
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A novel structure of micro-machined vibrating ring gyroscope (MVRG) with electromagnetic excitation and detection is proposed, which consists of a ring and eight pairs of symmetric crab-leg suspension springs. The whole structure is mirror-symmetric and centrosymmetric, providing the possibility to realize good mode-matching when the temperature changes or acceleration shocks. The sensitivity of the MVRG is analyzed in detail, and the stability of the structure over temperature and acceleration loads is analyzed using finite element analysis. The prototype of vibrating ring gyroscope is successfully fabricated through bulk silicon processes which adopt only one silicon wafer without bonding process. The gyroscope chip is assembled with SmCo permanent magnet and packaged in a metal case. The design of self-oscillation closed-loop circuit is presented. FEA simulations show that the performance of the MVRG is stable over temperature and acceleration loads and the structure can withstand shock loads up to 10000g without any special protection. Test results show that the sensitivity of the MVRG is 8.9mv/°/s and the resolution is 0.05°/s with nonlinearity about 0.23% over a range of ±200°/sec.
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Li Chen, Li Chen, Deyong Chen, Deyong Chen, Junbo Wang, Junbo Wang, } "The design and analysis of a robust micro-machined vibrating ring gyroscope", Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590D (2 February 2009); doi: 10.1117/12.810911; https://doi.org/10.1117/12.810911

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