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Monolithically integrable lateral PIN detectors have been developed. The device fabrication procedure has been optimized to be compatible with standard integrated circuit fabrication procedures.
D J Jackson andD L Persechini
"Monolithically Integrable High Speed Photodetectors", Proc. SPIE 0716, High Frequency Optical Communications, (23 February 1987); https://doi.org/10.1117/12.937457
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D J Jackson, D L Persechini, "Monolithically Integrable High Speed Photodetectors," Proc. SPIE 0716, High Frequency Optical Communications, (23 February 1987); https://doi.org/10.1117/12.937457