2 February 2009 Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter with double feedback control for real-time distance measurement
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Abstract
Optical path difference (OPD) and amplitude of a sinusoidal wavelength-scanning (SWS) are controlled with double feedback control system in an SWS interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength. An acousto-optic tunable filter (AOTF) is adopted as a wavelength-scanning device. The frequency of the SWS is 10 KHZ, and the measurement time required to reach a stable point of the control system is about 7ms. The measurement range is from 65 m to 190 m with the measurement error less than 4nm.
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Osami Sasaki, Osami Sasaki, Daiki Matsubara, Daiki Matsubara, Takamasa Suzuki, Takamasa Suzuki, } "Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter with double feedback control for real-time distance measurement", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71600L (2 February 2009); doi: 10.1117/12.817855; https://doi.org/10.1117/12.817855
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