2 February 2009 Micro-vibration measurement using self-mixing interferometer based on temporal carrier phase shifting technique
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Abstract
A new self-mixing interferometer (SMI) based on temporal carrier phase shifting technique is presented. Self-mixing interference occurs in the laser cavity by reflecting the light from a mirror-like target in front of the laser. Triangular phase modulation of the beam is obtained by an electrooptic modulator (EOM) in the external cavity. The phase of SMI signal coming from the photodetector is extracted by the phase shift demodulation algorithm based on sampling technique. Theoretical analysis and simulation calculations are presented and some errors of this method are discussed. The interferometer is applied to measure the Micro-vibration of a high-precision commercial PZT with an accuracy of <10nm.
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Hui Hao, Hui Hao, Ming Wang, Ming Wang, Dongmei Guo, Dongmei Guo, } "Micro-vibration measurement using self-mixing interferometer based on temporal carrier phase shifting technique", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71600W (2 February 2009); doi: 10.1117/12.807013; https://doi.org/10.1117/12.807013
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