2 February 2009 Spatial phase-shifting lateral shearing interferometer
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Abstract
The phase-shifting lateral shearing interferometer is widely adopted for wavefront measurement with high accuracy. For real-time wavefront measurement, a spatial phase-shifting lateral shearing interferometer is proposed. The interferometer includes a polarization lateral shearing module, a spatial phase-shifting module and an imaging module. The polarization lateral shearing module consists of a Savart polariscope. The spatial phase-shifting module is component of a non-polarization beam splitter, a polarization beam splitter, two rectangular prisms and a half wave-plate. The imaging module includes an imaging system and a CCD. The measured wavefront is sheared by the polarization lateral shearing module. The polarization directions of the two shearing beams are perpendicular to each other. The two shearing beams are split into four groups of beams by the spatial phase-shifting module to form four interferograms in a 2x2 matrix. The phase step of the four interferograms is 90 degrees. The four interferograms are captured in a single frame image by the imaging module. In experiments, a spherical wavefront with large radius of curvature was measured. Four spatial phase-shifting interferograms of the wavefront was obtained simultaneously. The usefulness of the interferometer is verified.
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Xiaoxian Guo, Aijun Zeng, Huijie Huang, "Spatial phase-shifting lateral shearing interferometer", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71602D (2 February 2009); doi: 10.1117/12.806931; https://doi.org/10.1117/12.806931
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