19 February 2009 Porous silicon waveguide with integrated grating coupler for DNA sensing
Author Affiliations +
Abstract
A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct peaks corresponding to the guided mode. A 0.420° reflectance shift was observed upon 16-base DNA hybridization, which was more than a factor of 5 larger than the observed reflectance shift after exposure to a mismatched DNA sequence.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xing Wei, Xing Wei, Christopher Kang, Christopher Kang, Guoguang Rong, Guoguang Rong, Scott T. Retterer, Scott T. Retterer, Sharon M. Weiss, Sharon M. Weiss, } "Porous silicon waveguide with integrated grating coupler for DNA sensing", Proc. SPIE 7167, Frontiers in Pathogen Detection: From Nanosensors to Systems, 71670C (19 February 2009); doi: 10.1117/12.809239; https://doi.org/10.1117/12.809239
PROCEEDINGS
7 PAGES


SHARE
Back to Top