Translator Disclaimer
12 February 2009 Nanostructure formation processes in femtosecond laser ablation of thin film surfaces
Author Affiliations +
Abstract
We have studied periodic nanostructure formation processes on hard thin film surfaces in femtosecond laser ablation. Using diamond-like carbon films patterned with submicrometer-size stripes, we found that the nanoscale ablation is preferentially initiated by the enhancement of a local field on the stripe surface having high curvature. Based on the experimental results for the initial stage of nanostructuring, it is concluded that the nanoscale ablation is initiated with the enhanced local field, and the periodicity is developed with the excitation of surface plasmon polaritons.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Godai Miyaji and Kenzo Miyazaki "Nanostructure formation processes in femtosecond laser ablation of thin film surfaces", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 720102 (12 February 2009); https://doi.org/10.1117/12.807681
PROCEEDINGS
11 PAGES


SHARE
Advertisement
Advertisement
Back to Top