On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths

Philippe Bado; Ali A. Said; Mark Dugan; Tom Haddock; Yves Bellouard

doi:10.1117/12.813749

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24 February 2009 On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths

Philippe Bado; Ali A. Said; Mark Dugan; Tom Haddock; Yves Bellouard

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Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 72010P (2009) https://doi.org/10.1117/12.813749
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential applications and technical challenges are reviewed.

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Philippe Bado, Ali A. Said, Mark Dugan, Tom Haddock, and Yves Bellouard "On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010P (24 February 2009); https://doi.org/10.1117/12.813749

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