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24 February 2009 On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths
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Abstract
We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential applications and technical challenges are reviewed.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe Bado, Ali A. Said, Mark Dugan, Tom Haddock, and Yves Bellouard "On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010P (24 February 2009); https://doi.org/10.1117/12.813749
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