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24 February 2009On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths
We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from
monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A
single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically
simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential
applications and technical challenges are reviewed.
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Philippe Bado, Ali A. Said, Mark Dugan, Tom Haddock, Yves Bellouard, "On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths," Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010P (24 February 2009); https://doi.org/10.1117/12.813749