Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy

Tommaso Baldacchini; Max Zimmerley; Eric O. Potma; Ruben Zadoyan

doi:10.1117/12.808269

24 February 2009 Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy

Tommaso Baldacchini; Max Zimmerley; Eric O. Potma; Ruben Zadoyan

Author Affiliations +

Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 72010Q (2009) https://doi.org/10.1117/12.808269
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

Two-photon polymerization (TPP) is an enabling technology that allows fast prototyping of parts with sub-100 nm resolution. Due to its ability to fabricate microstructures with arbitrary three-dimensional geometries, TPP has been employed in diverse fields such as photonics, microelectronics, microelectromechanical systems, and microfluidics. However, no information is available to date that microscopically correlates the experimental conditions used in TPP with the properties of the ultimate microstructure. We present a study where the distribution of polymer cross-linking in three-dimensional microstructures fabricated by TPP is visualized by means of nonlinear microscopy. In particular, coherent anti-Stokes Raman scattering (CARS) microscopy is employed to image polymer microstructures with chemical specificity. The characterization of the microstructures based on the acquired images permits rational optimization of the TPP process.

Citation Download Citation

Tommaso Baldacchini, Tommaso Baldacchini, Max Zimmerley, Max Zimmerley, Eric O. Potma, Eric O. Potma, Ruben Zadoyan, Ruben Zadoyan, } "Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010Q (24 February 2009); doi: 10.1117/12.808269; https://doi.org/10.1117/12.808269

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years