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24 February 2009 Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy
Tommaso Baldacchini; Max Zimmerley; Eric O. Potma; Ruben Zadoyan
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Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 72010Q (2009) https://doi.org/10.1117/12.808269
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States
Abstract
Two-photon polymerization (TPP) is an enabling technology that allows fast prototyping of parts with sub-100 nm resolution. Due to its ability to fabricate microstructures with arbitrary three-dimensional geometries, TPP has been employed in diverse fields such as photonics, microelectronics, microelectromechanical systems, and microfluidics. However, no information is available to date that microscopically correlates the experimental conditions used in TPP with the properties of the ultimate microstructure. We present a study where the distribution of polymer cross-linking in three-dimensional microstructures fabricated by TPP is visualized by means of nonlinear microscopy. In particular, coherent anti-Stokes Raman scattering (CARS) microscopy is employed to image polymer microstructures with chemical specificity. The characterization of the microstructures based on the acquired images permits rational optimization of the TPP process.
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Tommaso Baldacchini, Max Zimmerley, Eric O. Potma, and Ruben Zadoyan "Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010Q (24 February 2009); https://doi.org/10.1117/12.808269
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