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24 February 2009 Waveguide fabrication with femtosecond laser pulse shaped by computer-generated hologram
Jun'ichi Suzuki; Masahiro Yamaji; Shuhei Tanaka
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Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 72011C (2009) https://doi.org/10.1117/12.809816
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States
Abstract
We report on a new waveguide fabrication method with femtosecond laser pulses shaped by Computer-Generated Hologram (CGH). We design and make CGH's that generates a straight-line intensity distribution from an input laser intensity distribution. We fabricate a waveguide inside a fused silica sample with exposing the line intensity beam generated by the CGH, without translating the sample. The fabricated waveguide is 5.1 mm long and 6μm width. We also observe guided-light passing through the waveguide that is butt-coupled to a single mode fiber, at wavelength of 635 nm. The near field pattern is nearly circular cross section. This is the first achievement of waveguide fabrication using a CGH.
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Jun'ichi Suzuki, Masahiro Yamaji, and Shuhei Tanaka "Waveguide fabrication with femtosecond laser pulse shaped by computer-generated hologram", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72011C (24 February 2009); https://doi.org/10.1117/12.809816
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