Roll-to-roll manufacturing of subwavelength optics

Vivian W. Jones; Silva Theiss; Mark Gardiner; Jeff Clements; Jeffrey Florczak

doi:10.1117/12.809492

24 February 2009 Roll-to-roll manufacturing of subwavelength optics

Vivian W. Jones, Silva Theiss, Mark Gardiner, Jeff Clements, Jeffrey Florczak

Proceedings Volume 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II; 72050T (2009) https://doi.org/10.1117/12.809492
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Over the years there have been demonstrations of various methods capable of forming sub-micron features such as photo, electron beam, and imprint lithography. Generally these methods are limited to planar master tools of limited dimensional size. The subsequent replication processes using these master tools are typically a batch or a rollto- roll process with a tiled master roll tool. Presented here is a novel method for the large scale manufacturing of sub-micron structures via a roll-based mastering method suitable for industrial scale, based on a modification of single point diamond turning. Single point diamond turning has been exploited successfully to generate a wide range of optical structures from discrete optical components to large area micro-optic based films such as brightness enhancement films (BEF) for LCD displays. By applying advanced ion-milling techniques to structure diamond tools, it is possible to increase the complexity and ultimate dimensional resolution of diamond machined masters.

Citation Download Citation

Vivian W. Jones, Silva Theiss, Mark Gardiner, Jeff Clements, and Jeffrey Florczak "Roll-to-roll manufacturing of subwavelength optics", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 72050T (24 February 2009); https://doi.org/10.1117/12.809492

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