24 February 2009 Fabrication of two-layer diffractive optical element for single-beam and single-exposure fabrication of diamond-like photonic crystal
Author Affiliations +
Abstract
We report a new design and fabrication of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates. The fabricated phase mask consists of two layers of orthogonally oriented gratings produced in a polymer. The vertical spatial separation between two layers produces a phase difference among diffractive laser beams, which has enabled a holographic fabrication of diamond-like photonic crystal templates through single-beam and single-exposure process. The reported method simplifies the fabrication of photonic crystals and is amendable for massive production and chip-scale integration of three-dimensional photonic structures.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuankun Lin, Yuankun Lin, Ahmad Harb, Ahmad Harb, Daniel Rodriguez, Daniel Rodriguez, Karen Lozano, Karen Lozano, Di Xu, Di Xu, K. P. Chen, K. P. Chen, } "Fabrication of two-layer diffractive optical element for single-beam and single-exposure fabrication of diamond-like photonic crystal", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720515 (24 February 2009); doi: 10.1117/12.809626; https://doi.org/10.1117/12.809626
PROCEEDINGS
9 PAGES


SHARE
Back to Top