9 February 2009 In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test
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Abstract
A novel inverse approach based on an optical leak test is developed and implemented for in-situ measurement of gas diffusion properties of polymeric seals used in MEMS packages. Cavity pressure evolution during a leak test is documented as a function of time using laser-based interferometry, and the diffusion properties of a polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymer seal. The method is demonstrated successfully to determine the helium diffusivity and solubility of the polymeric seal used in a package.
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Changsoo Jang, Changsoo Jang, Arindam Goswami, Arindam Goswami, Bongtae Han, Bongtae Han, } "In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test", Proc. SPIE 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII, 720607 (9 February 2009); doi: 10.1117/12.810001; https://doi.org/10.1117/12.810001
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