Development of a novel surface acoustic wave MEMS-IDT gyroscope

Haekwan Oh; Keekeun Lee; Wen Wang; Sungjin Yun; Sangsik Yang

doi:10.1117/12.809991

9 February 2009 Development of a novel surface acoustic wave MEMS-IDT gyroscope

Haekwan Oh, Keekeun Lee, Wen Wang, Sungjin Yun, Sangsik Yang

Proceedings Volume 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII; 72060I (2009) https://doi.org/10.1117/12.809991
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

This paper presents a configuration of a novel surface acoustic wave (SAW) micro-electro-mechanical-systems (MEMS) interdigital transducer (IDT) gyroscope different from the current SAW MEMS-IDT gyroscope consists of a two-port SAW resonator and a delay line as the sensor, this paper provides a new configuration of SAW gyroscope based on the interference effect of two crossed SAWs, one is induced by the Coriolis force from the input rotation, and the other is from the SAW device with same operation frequency. A differential structure of two delay line oscillator is used to compensate the temperature effect. Based on the coupling of modes (COM) simulation, an 80MHz two ports SAW resonator and dual-delay line were fabricated and characterized by the HP network analyzer. In the primary gyroscope experimental results, a frequency change of 2500Hz was observed at rate of 500 deg/s from the SAW delay line by interference effect between the secondary SAW induced by Coriolis force and the running SAW from the delay line.

Citation Download Citation

Haekwan Oh, Keekeun Lee, Wen Wang, Sungjin Yun, and Sangsik Yang "Development of a novel surface acoustic wave MEMS-IDT gyroscope", Proc. SPIE 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII, 72060I (9 February 2009); https://doi.org/10.1117/12.809991

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