Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement

D. Jung; D. Kallweit; T. Sandner; H. Conrad; H. Schenk; H. Lakner

doi:10.1117/12.808210

23 February 2009 Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement

D. Jung, D. Kallweit, T. Sandner, H. Conrad, H. Schenk, H. Lakner

Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 72080A (2009) https://doi.org/10.1117/12.808210
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

A technology approach is presented which enables an initial permanent counter electrode deflection of planar out of plane comb drive actuators allowing quasistatic operation of an electrostatic microscanner. The device is assembled by mounting a top wafer with salient stamps onto a mirror wafer. The commonly fix in plane counter electrode parts on the mirror wafer are connected to deflectable platforms via a mechanical structure of coupled hinges. During the wafers assembly the down pressing stamps displace the platforms and result in a predefined permanent out of plane counter comb deflection.

Citation Download Citation

D. Jung, D. Kallweit, T. Sandner, H. Conrad, H. Schenk, and H. Lakner "Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080A (23 February 2009); https://doi.org/10.1117/12.808210

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