24 February 2009 Novel MWIR microspectrometer based on a tunable detector
Author Affiliations +
Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 72080D (2009); doi: 10.1117/12.816578
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States
In this paper we present basic designs, operation concepts and some application examples of a novel microspectrometer for the spectral range of 3-5μm, which is based on a pyroelectric detector with an integrated micromachined Fabry-Perot filter (FPF). We discuss the influence of different optical setups on the spectral resolution and the signal-to-noise ratio of the microspectrometer. Two basic operation modes, step scan mode and continuous sweep mode are demonstrated. Such a device has a large potential in the field of infrared absorption spectroscopy, particularly if multicomponent mixtures have to be analyzed.
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Norbert Neumann, Martin Ebermann, Steffen Kurth, Karla Hiller, "Novel MWIR microspectrometer based on a tunable detector", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080D (24 February 2009); doi: 10.1117/12.816578; https://doi.org/10.1117/12.816578


Optical filters

Signal to noise ratio

Electronic filtering


Spectral resolution

Signal detection

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