23 February 2009 Addressable microshutter array for a high-performance infrared miniature dispersive spectrometer
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Programmable microshutter arrays were designed to improve the attainable signal to noise ratio (SNR) of a miniature dispersive spectrometer developed for space applications. Integration of a microshutter array to this instrument provides advantages such as the addition of a binary coded optical input operation mode for the miniature spectrometer which results in SNR benefits without spectral resolution loss. These arrays were successfully fabricated using surface micromachining technology. Each microshutter is basically an electrostatic zipping actuator having a curved shape. Applying critical voltage to one microshutter pulls the actuator down to the substrate and closes the associated slit. Opening of the microslits relies on the restoring force generated within the actuated zippers. High light transmission is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. The pull-in voltage to close the microslits was about 110 V and the response times to close and open the microslits were about 2 ms and 7 ms, respectively. Selected array dies were mounted in modified off-the-shelf ceramic packages and electrically connected to package pins. The packages were hermetically sealed with AR coated sapphire windows. This last packaging step was performed in a dry nitrogen controlled atmosphere.
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S. Ilias, S. Ilias, F. Picard, F. Picard, C. Larouche, C. Larouche, R. Kruzelecky, R. Kruzelecky, W. Jamroz, W. Jamroz, } "Addressable microshutter array for a high-performance infrared miniature dispersive spectrometer", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080H (23 February 2009); doi: 10.1117/12.810163; https://doi.org/10.1117/12.810163

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