24 February 2009 Empirical analysis of form drag damping for scanning micromirrors
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Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 72080S (2009); doi: 10.1117/12.809886
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States
Damping is a critical factor affecting the dynamics of resonant scanning micromirrors and the design of their actuator systems. For any new micromirror design, modeling the damping to sufficient accuracy to predict the performance can save much effort in testing and redesign. To address this challenge, a simple formula for the air drag on scanning micromirrors is postulated that contains a drag coefficient, which is treated as a function of the Reynolds number that is fit to experimental measurements of the damping of two different MEMS scanning mirrors. A formula is found that describes the drag coefficients for both scanning mirrors for a range of their Reynolds numbers.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wyatt O. Davis, "Empirical analysis of form drag damping for scanning micromirrors", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080S (24 February 2009); doi: 10.1117/12.809886; https://doi.org/10.1117/12.809886



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