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23 February 2009 Scaling of the Iris AO segmented MEMS DM to larger arrays
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Abstract
This paper presents preliminary development results of a high-stroke (>8 μm), 489 actuator, 163-piston/tip/tilt-segment deformable mirror (DM) and progress on a proof-of-concept 925-piston/tip/tilt-segment DM. It also presents a compact 512-channel driver box used to drive the 489 actuators of the 163-PTT-segment design.
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Michael A. Helmbrecht, Min He, and Carl J. Kempf "Scaling of the Iris AO segmented MEMS DM to larger arrays", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090L (23 February 2009); https://doi.org/10.1117/12.813824
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