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23 February 2009Advanced optical coatings of a segmented MEMS DM
The performance of microelectromechanical systems deformable mirrors (MEMS DMs) continues to improve in areas of
stroke, open-loop positioning, actuator count, and drive electronics. However, a key area lacking in the development of
these devices is good optical coatings suitable for a broad spectrum of applications and wavelengths. This paper
discusses the progress Iris AO has made towards coating its MEMS DMs with gold, protected aluminum, protected
silver, and dielectric coatings.
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Michael A. Helmbrecht, Min He, "Advanced optical coatings of a segmented MEMS DM," Proc. SPIE 7209, MEMS Adaptive Optics III, 72090M (23 February 2009); https://doi.org/10.1117/12.813821