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23 February 2009 Advanced optical coatings of a segmented MEMS DM
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Abstract
The performance of microelectromechanical systems deformable mirrors (MEMS DMs) continues to improve in areas of stroke, open-loop positioning, actuator count, and drive electronics. However, a key area lacking in the development of these devices is good optical coatings suitable for a broad spectrum of applications and wavelengths. This paper discusses the progress Iris AO has made towards coating its MEMS DMs with gold, protected aluminum, protected silver, and dielectric coatings.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael A. Helmbrecht and Min He "Advanced optical coatings of a segmented MEMS DM", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090M (23 February 2009); https://doi.org/10.1117/12.813821
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