6 February 2009 Silicon slot waveguides for nonlinear optics
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Abstract
Slot waveguides are designed for silicon-based nonlinear optics. The critical processes in manufacturing such waveguides are lithography, etching and slot filling. Their effects on the properties of the waveguides are studied.
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A. Säynätjoki, A. Säynätjoki, L. Karvonen, L. Karvonen, A. Khanna, A. Khanna, T. Alasaarela, T. Alasaarela, A. Tervonen, A. Tervonen, S. Honkanen, S. Honkanen, } "Silicon slot waveguides for nonlinear optics", Proc. SPIE 7212, Optical Components and Materials VI, 72120T (6 February 2009); doi: 10.1117/12.812974; https://doi.org/10.1117/12.812974
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