12 February 2009 Terahertz quantum cascade laser integration with on-chip micromachined rectangular waveguides
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Integration of THz quantum cascade lasers (QCLs) with single-mode 75 μm x 37 μm rectangular waveguide components, including horn antennas, couplers, and bends, for operation at 3 THz has been designed and fabricated using thick gold micromachining. Measurements on the isolated waveguide components exhibit fairly low loss and integration with THz QCLs has been demonstrated. This technology offers the potential for realizing miniature integrated systems operating in the 3 THz frequency range.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael C. Wanke, Michael C. Wanke, Christopher D. Nordquist, Christopher D. Nordquist, Michael J. Cich, Michael J. Cich, Adam M. Rowen, Adam M. Rowen, Christian L. Arrington, Christian L. Arrington, Mark Lee, Mark Lee, Albert D. Grine, Albert D. Grine, Chuck T. Fuller, Chuck T. Fuller, John L. Reno, John L. Reno, Erik W. Young, Erik W. Young, } "Terahertz quantum cascade laser integration with on-chip micromachined rectangular waveguides", Proc. SPIE 7215, Terahertz Technology and Applications II, 721504 (12 February 2009); doi: 10.1117/12.809853; https://doi.org/10.1117/12.809853

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