17 February 2009 Characterization of ZnO thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of ZnO by metal organic chemical vapor deposition
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Abstract
The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.
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David J. Rogers, F. Hosseini Teherani, C. Sartel, V. Sallet, F. Jomard, P. Galtier, M. Razeghi, "Characterization of ZnO thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of ZnO by metal organic chemical vapor deposition", Proc. SPIE 7217, Zinc Oxide Materials and Devices IV, 72170F (17 February 2009); doi: 10.1117/12.817032; https://doi.org/10.1117/12.817032
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