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17 February 2009 Channel waveguide fabrication via microtransfer molding and microfluidic technique
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Abstract
We report on various single and multimode channel waveguide structures fabricated via microtransfer molding and microfluidic techniques. These soft lithographic fabrication techniques can result in an inexpensive and rapid turnover of various types of channel waveguide structures and general integrated optic devices. It may be particularly useful for production of waveguides on user-desired surface substrates including those of a curved or distorted nature. Microscopic cross-sectional images for both single and multimode waveguides are obtained and compared between the two fabrication methods. The novel microfluidic technique results in superior waveguide formation and improved propagation loss performance.
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Sarfaraz Baig, Bing Chen, Angel Flores, Sangyup Song, and Michael R. Wang "Channel waveguide fabrication via microtransfer molding and microfluidic technique", Proc. SPIE 7221, Photonics Packaging, Integration, and Interconnects IX, 72210L (17 February 2009); https://doi.org/10.1117/12.810554
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