Large-scale integrated optics using TriPleX waveguide technology: from UV to IR

René Heideman; Arne Leinse; Willem Hoving; Ronald Dekker; Douwe Geuzebroek; Edwin Klein; Remco Stoffer; Chris Roeloffzen; Leimeng Zhuang; Arjan Meijerink

doi:10.1117/12.808409

12 February 2009 Large-scale integrated optics using TriPleX waveguide technology: from UV to IR

René Heideman, Arne Leinse, Willem Hoving, Ronald Dekker, Douwe Geuzebroek, Edwin Klein, Remco Stoffer, Chris Roeloffzen, Leimeng Zhuang, Arjan Meijerink

Author Affiliations +

Proceedings Volume 7221, Photonics Packaging, Integration, and Interconnects IX; 72210R (2009) https://doi.org/10.1117/12.808409
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si₃N₄) shell filled with and encapsulated by silicon dioxide (SiO₂). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.

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René Heideman, René Heideman, Arne Leinse, Arne Leinse, Willem Hoving, Willem Hoving, Ronald Dekker, Ronald Dekker, Douwe Geuzebroek, Douwe Geuzebroek, Edwin Klein, Edwin Klein, Remco Stoffer, Remco Stoffer, Chris Roeloffzen, Chris Roeloffzen, Leimeng Zhuang, Leimeng Zhuang, Arjan Meijerink, Arjan Meijerink, "Large-scale integrated optics using TriPleX waveguide technology: from UV to IR", Proc. SPIE 7221, Photonics Packaging, Integration, and Interconnects IX, 72210R (12 February 2009); doi: 10.1117/12.808409; https://doi.org/10.1117/12.808409

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