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12 February 2009 Large-scale integrated optics using TriPleX waveguide technology: from UV to IR
René Heideman; Arne Leinse; Willem Hoving; Ronald Dekker; Douwe Geuzebroek; Edwin Klein; Remco Stoffer; Chris Roeloffzen; Leimeng Zhuang; Arjan Meijerink
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Proceedings Volume 7221, Photonics Packaging, Integration, and Interconnects IX; 72210R (2009) https://doi.org/10.1117/12.808409
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States
Abstract
We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.
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René Heideman, Arne Leinse, Willem Hoving, Ronald Dekker, Douwe Geuzebroek, Edwin Klein, Remco Stoffer, Chris Roeloffzen, Leimeng Zhuang, and Arjan Meijerink "Large-scale integrated optics using TriPleX waveguide technology: from UV to IR", Proc. SPIE 7221, Photonics Packaging, Integration, and Interconnects IX, 72210R (12 February 2009); https://doi.org/10.1117/12.808409
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