A VCSEL-based miniature laser-self-mixing interferometer with integrated optical and electronic components

Armand Pruijmboom; Silvia Booij; Marcel Schemmann; Klaus Werner; Pieter Hoeven; Henri van Limpt; Steffan Intemann; Rafael Jordan; Thomas Fritzsch; Hermann Oppermann; Michel Barge

doi:10.1117/12.808810

12 February 2009 A VCSEL-based miniature laser-self-mixing interferometer with integrated optical and electronic components

Armand Pruijmboom, Silvia Booij, Marcel Schemmann, Klaus Werner, Pieter Hoeven, Henri van Limpt, Steffan Intemann, Rafael Jordan, Thomas Fritzsch, Hermann Oppermann, Michel Barge

Author Affiliations +

Proceedings Volume 7221, Photonics Packaging, Integration, and Interconnects IX; 72210S (2009) https://doi.org/10.1117/12.808810
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

It has been previously published how, using two separate Vertical-Cavity-Surface-Emitting-Lasers (VCSELs), a miniature laser-Doppler interferometer can be made for quasi-three-dimensional displacement measurements. For the use in consumer applications as PC-mice, the manufacturing costs of such sensors need to be minimized. This paper describes the fabrication of a low-cost laser-self-mixing sensor by integrating silicon and GaAs components using flip-chip technology. Wafer-scale lens replication on GaAs wafers is used to achieve integrated optics. In this way a sensor was realized without an external lens and that uses only a single GaAs VCSEL crystal, while maintaining its quasi-three-dimensional sensor capabilities.

Citation Download Citation

Armand Pruijmboom, Silvia Booij, Marcel Schemmann, Klaus Werner, Pieter Hoeven, Henri van Limpt, Steffan Intemann, Rafael Jordan, Thomas Fritzsch, Hermann Oppermann, and Michel Barge "A VCSEL-based miniature laser-self-mixing interferometer with integrated optical and electronic components", Proc. SPIE 7221, Photonics Packaging, Integration, and Interconnects IX, 72210S (12 February 2009); https://doi.org/10.1117/12.808810

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