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6 February 2009 Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems
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Abstract
We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ansas M. Kasten, Joshua D. Tice, Antonios V. Giannopoulos, Varun B. Verma, Paul J. A. Kenis, and Kent D. Choquette "Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems", Proc. SPIE 7229, Vertical-Cavity Surface-Emitting Lasers XIII, 722909 (6 February 2009); https://doi.org/10.1117/12.813407
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