Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

Ansas M. Kasten; Joshua D. Tice; Antonios V. Giannopoulos; Varun B. Verma; Paul J. A. Kenis; Kent D. Choquette

doi:10.1117/12.813407

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6 February 2009 Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems

Ansas M. Kasten; Joshua D. Tice; Antonios V. Giannopoulos; Varun B. Verma; Paul J. A. Kenis; Kent D. Choquette

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Proceedings Volume 7229, Vertical-Cavity Surface-Emitting Lasers XIII; 722909 (2009) https://doi.org/10.1117/12.813407
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

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Ansas M. Kasten, Joshua D. Tice, Antonios V. Giannopoulos, Varun B. Verma, Paul J. A. Kenis, and Kent D. Choquette "Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems", Proc. SPIE 7229, Vertical-Cavity Surface-Emitting Lasers XIII, 722909 (6 February 2009); https://doi.org/10.1117/12.813407

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