3D microchips fabricated by femtosecond laser for biomedical applications

Koji Sugioka; Yasutaka Hanada; Katsumi Midorikawa

doi:10.1117/12.817357

17 November 2008 3D microchips fabricated by femtosecond laser for biomedical applications

Koji Sugioka, Yasutaka Hanada, Katsumi Midorikawa

Proceedings Volume 7266, Optomechatronic Technologies 2008; 726603 (2008) https://doi.org/10.1117/12.817357
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States

Abstract

Three-dimensional (3D) microfabrication of photosensitive glass by femtosecond (fs) laser direct writing is demonstrated for manufacture of microchips for biomedical applications. The fs laser direct writing followed by annealing and successive wet etching can fabricate the hollow microstructures, achieving a vareiety of microfluidic components and microoptical components in a glass chip. One of the interesting and important applications of the 3D microfluidic structures fabricated by the present technique is inspection of living microorganisms. The microchips used for this application are referred to as nanoaquarium. Furthermore, the optical waveguide is written inside the glass by the fs laser direct writing without the annealing and the successive etching. It is revealed that integration of the microfluidic and microoptical components with the optical waveguides in a single glass chip is of great use for biochemical analysis and medical inspection based on optical sensing.

Citation Download Citation

Koji Sugioka, Yasutaka Hanada, and Katsumi Midorikawa "3D microchips fabricated by femtosecond laser for biomedical applications", Proc. SPIE 7266, Optomechatronic Technologies 2008, 726603 (17 November 2008); https://doi.org/10.1117/12.817357

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