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17 November 2008 Nanotechnology and high-precision optical displacement sensor design for optomechatronical systems
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Proceedings Volume 7266, Optomechatronic Technologies 2008; 72660L (2008) https://doi.org/10.1117/12.804406
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States
Abstract
In this paper, design of an ultra high-resolution, compact and tunable optical displacement sensor for optomechatronical systems is presented. In this proposal nanophotonic principles are used to develop displacement sensor which is required strongly in micro and nano machines especially micro robotics. For this purpose, in this work nanocrystal doped micro ring resonator is used as the basic cell. Then we propose integrated case for array applications such as array of micro mirrors. We show that the proposed sensor can easily detect well below nanometer to near picometer ranges. Also, it is illustrated that using Electromagnetically Induced Transparency (EIT) resolution of the proposed sensor can be increased.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ali Rostami, R. Yadipour, K. Abbasian, Z. D. Koozehkanani, A. Ghanbari, and F. Janabi-Sharifi "Nanotechnology and high-precision optical displacement sensor design for optomechatronical systems", Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660L (17 November 2008); https://doi.org/10.1117/12.804406
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