Flexible visual feedback for automated nanohandling inside an SEM

S. Fatikow; D. Jasper; C. Edeler; C. Dahmen

doi:10.1117/12.807090

17 November 2008 Flexible visual feedback for automated nanohandling inside an SEM

S. Fatikow, D. Jasper, C. Edeler, C. Dahmen

Proceedings Volume 7266, Optomechatronic Technologies 2008; 72660X (2008) https://doi.org/10.1117/12.807090
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States

Abstract

This paper describes the implementation of several key components that were used to build a prototype for a versatile camera system operating in a scanning electron microscope. For the precise alignment of the camera inside the vacuum chamber, a stick-slip-based actuator was developed, that can create a high torque while having small dimensions. The camera is mounted on a rail and carriage system and the implemented combination of absolute and relative optical sensors is described. Finally, several object tracking scenarios are defined and first results of implemented tracking algorithms are given.

Citation Download Citation

S. Fatikow, D. Jasper, C. Edeler, and C. Dahmen "Flexible visual feedback for automated nanohandling inside an SEM", Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660X (17 November 2008); https://doi.org/10.1117/12.807090

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