One-step fabrication of micro-deflector and optical waveguide by femtosecond two-photon polymerization

Chao-Yi Tai; Jia-Wei Tseng

doi:10.1117/12.809345

30 December 2008 One-step fabrication of micro-deflector and optical waveguide by femtosecond two-photon polymerization

Chao-Yi Tai, Jia-Wei Tseng

Proceedings Volume 7268, Smart Structures, Devices, and Systems IV; 72680G (2008) https://doi.org/10.1117/12.809345
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia

Abstract

We present simultaneous fabrication of micro-deflector and optical waveguide using femtosecond two photon polymerization technique. Parallelepiped-shaped waveguide was created which may serve as beam deflectors for layerto- layer optical interconnection. The quality of the polymerized surface was characterized by atomic force microscope (AFM) which shows the root-mean-square (RMS) roughness is no greater than 5nm. The propagation and reflection loss of the fabricated waveguide at wavelength of 850nm are estimated to be <1dB/cm and <1.5dB per reflection, respectively. Based on this result, the total layer-to-layer insertion loss was estimated to be less than 4dB/cm, demonstrating the great potential for optical interconnections on printed circuit boards (PCBs).

Citation Download Citation

Chao-Yi Tai and Jia-Wei Tseng "One-step fabrication of micro-deflector and optical waveguide by femtosecond two-photon polymerization", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680G (30 December 2008); https://doi.org/10.1117/12.809345

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