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30 December 2008 A smart resonating micro-cantilever in MEMS gas sensor: improved design
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Abstract
A smart micro-cantilever in a creative gas sensor with high sensitivity is presented. The resonance frequency shifting of the cantilever is monitored to detect its mass change caused by adsorption of certain gas molecules. The cantilever has a more compact MEMS structure and the smart functions because of the sensor with a self-actuating and detecting (SAD) vibration system, which is integration of a vibration actuating system and a detecting system. The model of the smart beam is analyzed by computer simulation. Design rules of the beam are obtained according to related discuss with function goal of extremely rare gas detection. After fabrication and test of the smart cantilever, an improved solution of the smart cantilever is introduced by comparison study of the computer simulation and experiment results of the fabricated beam.
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Jia Hao Zhao, Shi Jie Yu, Ke Li, Qin Zhou, and Zheng You "A smart resonating micro-cantilever in MEMS gas sensor: improved design", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680T (30 December 2008); https://doi.org/10.1117/12.810579
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