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30 December 2008 Ni-PTFE electroformed micro parts by SU8-based UV-LIGA
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Abstract
The SU8-based UV-LIGA process, which combines lithography with electroforming, is a low cost fabrication method for producing MEMS and precision engineering parts. With lower surface energy and friction coefficient, these micro parts are required for applications such as micro gears and movable microstructures. This paper introduces a technique to fabricate Ni-PTFE micro parts using special treated galvanic bath. The experiment results show that the composite electroforming process is robust and the fabricated Ni-PTFE parts have good tribological properties.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuhua Guo, Yingnan Wang, Tom C. Kong, and R. Du "Ni-PTFE electroformed micro parts by SU8-based UV-LIGA", Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 72690O (30 December 2008); https://doi.org/10.1117/12.810665
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