17 March 2009 The application of EUV lithography for 40nm node DRAM device and beyond
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Abstract
Extreme ultraviolet lithography (EUVL) is one of the leading candidates for next-generation lithography technology for the 32 nm half-pitch node and beyond. We have evaluated the Alpha Demo Tool(ADT) characterizing for mixed-andmatched overlay(MMO), flare noise, and resolution limit. For process integration, one of the important things in EUVL is overlay capability. We performed an overlay matching test of a 1.35NA and 193 immersion tool using a low thermal expansion material(LTEM) mask. We also investigated the flare level of the EUV ADT for device applications. The current EUV tool has a higher flare level than ArF lithography tools. We applied a contact layer for 40nm node device integration to reduce the variation in critical dimension(CD) from the flare noise.
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Joo-on Park, Joo-on Park, Chawon Koh, Chawon Koh, Doohoon Goo, Doohoon Goo, InSung Kim, InSung Kim, Changmin Park, Changmin Park, Jeonghoon Lee, Jeonghoon Lee, JinHong Park, JinHong Park, JeongHo Yeo, JeongHo Yeo, Seong-Woon Choi, Seong-Woon Choi, Chan-hoon Park, Chan-hoon Park, } "The application of EUV lithography for 40nm node DRAM device and beyond", Proc. SPIE 7271, Alternative Lithographic Technologies, 727114 (17 March 2009); doi: 10.1117/12.814001; https://doi.org/10.1117/12.814001
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