Paper
17 March 2009 Step and flash imprint lithography for manufacturing patterned media
Cynthia Brooks, Gerard M. Schmid, Mike Miller, Steve Johnson, Niyaz Khusnatdinov, Dwayne LaBrake, Douglas J. Resnick, S. V. Sreenivasan
Author Affiliations +
Abstract
The ever-growing demand for hard drives with greater storage density has motivated a technology shift from continuous magnetic media to patterned media hard disks, which are expected to be implemented in future generations of hard disk drives to provide data storage at densities exceeding 1012 bits per square inch. Step and Flash Imprint Lithography (S-FIL) technology has been employed to pattern the hard disk substrates. This paper discusses the infrastructure required to enable S-FIL in high-volume manufacturing; namely, fabrication of master templates, template replication, high-volume imprinting with precisely controlled residual layers, and dual-sided imprinting. Imprinting of disks is demonstrated with substrate throughput currently as high as 180 disks/hour (dualsided). These processes are applied to patterning hard disk substrates with both discrete tracks and bit-patterned designs.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Cynthia Brooks, Gerard M. Schmid, Mike Miller, Steve Johnson, Niyaz Khusnatdinov, Dwayne LaBrake, Douglas J. Resnick, and S. V. Sreenivasan "Step and flash imprint lithography for manufacturing patterned media", Proc. SPIE 7271, Alternative Lithographic Technologies, 72711L (17 March 2009); https://doi.org/10.1117/12.815016
Lens.org Logo
CITATIONS
Cited by 9 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Magnetism

Optical lithography

Lithography

Silica

Chromium

Etching

Beam propagation method

Back to Top