18 March 2009 Inspection 13.2-nm table-top full-field microscope
Author Affiliations +
Abstract
We present results on a table-top microscope that uses an EUV stepper geometry to capture full-field images with a halfpitch spatial resolution of 55 nm. This microscope uses a 13.2 nm wavelength table-top laser for illumination and acquires images of reflective masks with exposures of 20 seconds. These experiments open the path to the realization of high resolution table-top imaging systems for actinic defect characterization.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. P. Naulleau, P. W. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, C. S. Menoni, "Inspection 13.2-nm table-top full-field microscope", Proc. SPIE 7271, Alternative Lithographic Technologies, 72713F (18 March 2009); doi: 10.1117/12.814320; https://doi.org/10.1117/12.814320
PROCEEDINGS
7 PAGES


SHARE
Back to Top