23 March 2009 Methodologies for evaluating CD-matching of CD-SEM
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As CD-SEM's precision is severely controlled by sub-nanometer level, we have to evaluate not only repeatability of tools but also CD-matching between the individual tools. However, it is not easy to measure the CD-matching precisely ± 0.1nm due to repeatability error, stability change, carryover effect, statistical fluctuation of sampling, etc. varying in the individual tools. In this work uncertainty of ABBA test is experimentally estimated with self-ABBA test. Sample's carryover trend that dominates uncertainty of the test can be checked. Mathematical consideration implements precise calculation of the ABBA test.
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Hiroki Kawada, Hiroki Kawada, Chih-Ming Ke, Chih-Ming Ke, Ya-Chun Cheng, Ya-Chun Cheng, Yu-Hsi Wang, Yu-Hsi Wang, } "Methodologies for evaluating CD-matching of CD-SEM", Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72720Y (23 March 2009); doi: 10.1117/12.815186; https://doi.org/10.1117/12.815186

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