Development of a novel methodology for effective partial die inspection and monitoring

Byoung-Ho Lee; Tae-Yong Lee; Andrew Cross; Masami Aoki; HeungSoo Choi; YeonHo Pae

doi:10.1117/12.813994

23 March 2009 Development of a novel methodology for effective partial die inspection and monitoring

Byoung-Ho Lee, Tae-Yong Lee, Andrew Cross, Masami Aoki, HeungSoo Choi, YeonHo Pae

Proceedings Volume 7272, Metrology, Inspection, and Process Control for Microlithography XXIII; 72723K (2009) https://doi.org/10.1117/12.813994
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

Defect inspection is a challenge in the edge of wafer region and several new inspection tools and techniques have come to the market to fulfill this inspection need. Current inspection methodology excludes inspection of partial die located at the wafer edge, which has lead to the development of a technique available for patterned wafer inspection tools to inspect these partially printed die. In this paper we identify and develop a robust methodology for the characterization and monitoring of defectivity on the partially printed edge die. The methodology includes the development of methods for inspection optimisation requirements, characterization and isolation of defect sources, optimisation of clustering and binning and control of partial die defectivity.

Citation Download Citation

Byoung-Ho Lee, Tae-Yong Lee, Andrew Cross, Masami Aoki, HeungSoo Choi, and YeonHo Pae "Development of a novel methodology for effective partial die inspection and monitoring", Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72723K (23 March 2009); https://doi.org/10.1117/12.813994

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available