16 March 2009 Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
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We demonstrate experimentally for the first time the feasibility of applying SMO technology using pixelated illumination. Wafer images of SRAM contact holes were obtained to confirm the feasibility of using SMO for 22nm node lithography. There are still challenges in other areas of SMO integration such as mask build, mask inspection and repair, process modeling, full chip design issues and pixelated illumination, which is the emphasis in this paper. In this first attempt we successfully designed a manufacturable pixelated source and had it fabricated and installed in an exposure tool. The printing result is satisfactory, although there are still some deviations of the wafer image from simulation prediction. Further experiment and modeling of the impact of errors in source design and manufacturing will proceed in more detail. We believe that by tightening all kind of specification and optimizing all procedures will make pixelated illumination a viable technology for 22nm or beyond. Publisher's Note: The author listing for this paper has been updated to include Carsten Russ. The PDF has been updated to reflect this change.
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Kafai Lai, Kafai Lai, Alan E. Rosenbluth, Alan E. Rosenbluth, Saeed Bagheri, Saeed Bagheri, John Hoffnagle, John Hoffnagle, Kehan Tian, Kehan Tian, David Melville, David Melville, Jaione Tirapu-Azpiroz, Jaione Tirapu-Azpiroz, Moutaz Fakhry, Moutaz Fakhry, Young Kim, Young Kim, Scott Halle, Scott Halle, Greg McIntyre, Greg McIntyre, Alfred Wagner, Alfred Wagner, Geoffrey Burr, Geoffrey Burr, Martin Burkhardt, Martin Burkhardt, Daniel Corliss, Daniel Corliss, Emily Gallagher, Emily Gallagher, Tom Faure, Tom Faure, Michael Hibbs, Michael Hibbs, Donis Flagello, Donis Flagello, Joerg Zimmermann, Joerg Zimmermann, Bernhard Kneer, Bernhard Kneer, Frank Rohmund, Frank Rohmund, Frank Hartung, Frank Hartung, Christoph Hennerkes, Christoph Hennerkes, Manfred Maul, Manfred Maul, Robert Kazinczi, Robert Kazinczi, Andre Engelen, Andre Engelen, Rene Carpaij, Rene Carpaij, Remco Groenendijk, Remco Groenendijk, Joost Hageman, Joost Hageman, Carsten Russ, Carsten Russ, } "Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process", Proc. SPIE 7274, Optical Microlithography XXII, 72740A (16 March 2009); doi: 10.1117/12.814680; https://doi.org/10.1117/12.814680

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