16 March 2009 Partially coherent image computation using elementary functions
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It is well-known that calculations of the propagation of partially coherent light, such as those required for the calculation of two-dimensional image intensities, involve four-dimensional functions. Recently, Wald et al [Proc SPIE, 59621G, 2005] outlined a method for reducing the four-dimensional problem to a purely twodimensional one. Instead of an exact modal expansion of the mutual coherence function or cross-spectral density, an approximate expansion is used, into what we call elementary functions. In this paper, rules of thumb are developed for fast and efficient computation of the image intensity in a simple partially coherent lithographic imaging system.
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Arlene Smith, Arlene Smith, Anna Burvall, Anna Burvall, Christopher Dainty, Christopher Dainty, } "Partially coherent image computation using elementary functions", Proc. SPIE 7274, Optical Microlithography XXII, 727434 (16 March 2009); doi: 10.1117/12.814072; https://doi.org/10.1117/12.814072


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