13 March 2009 Manufacturing system based on tolerance deduced from design intention
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Scaling of integrated circuits over the past several ten years has been done successfully by improvement of photolithography equipment and resolution enhancement technique. The smaller the feature size is, the tighter controllability of critical dimension (CD) is required. Enormous efforts have been made to achieve device specifications. Especially in logic devices as system on chip, controllability of gate transistor CD is the one of the greatest concern for both designer and manufacturer since characteristics of device chip, speed and power, are largely depend on the gate CD. From the viewpoint of manufacturer all gate transistors on a chip have equivalent weight and tight CD controls are applied to them. Nevertheless, each transistor has a various weight and required controllability is definitely different from the viewpoint of chip designer. In this paper, we introduce the concepts of tolerance as representation of design intentions. An intention derived at chip designing stage is converted to a formula which is comprehensive and measurable at manufacturing1,2. Timing margin of each path, which is derived from timing analysis at chip design, can be converted to the most comprehensive formula as CD tolerance, for instance. Two major application of the tolerance deduced from design intention will be presented. The first one is reduction of OPC processing time and the second application of the tolerance is qualification at photo-mask and wafer processing. Comprehension of design intentions and interpretation of them to tolerance will be promising way for cost effective manufacturing.
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Suigen Kyoh, Suigen Kyoh, Shimon Maeda, Shimon Maeda, Sachiko Kobayashi, Sachiko Kobayashi, Soichi Inoue, Soichi Inoue, "Manufacturing system based on tolerance deduced from design intention", Proc. SPIE 7275, Design for Manufacturability through Design-Process Integration III, 72750M (13 March 2009); doi: 10.1117/12.814081; https://doi.org/10.1117/12.814081

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