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19 February 2009 The investigation of thin film growth on the surface of sub-wave grating microstructure
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Abstract
Thin film growth on plane structure surface was discussed by mostly articles, but thin film growth on the microstructure surface like sub-wave grating was little reported. The growth of 100 nm Au film on the surface of sub-wave grating with sine groove shape and 80 nm groove depth was investigated in this article. It was shown by experiments that the thin film growth was the profiling grow, the grating sine grooved characteristic and periodic were almost unchanged, but after coating, some phenomena like the increasing of sine duty factor, the worse uniformity of grating groove depth and the decreasing of groove depth were shown by experiments. The theory of thin film growth shadow effect which is brought by the grating microstructure was proposed to carry on the theoretical analysis in this article. The judging method of film dispersion pattern was also brought up, which was based on the thickness of thin film and the groove depth of grating before coating. When the thickness of thin film was lower than the groove depth, film dispersion pattern was defined as "A" model. The opposite was defined as "B" model.
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Limeng Yuan, Dawei Zhang, Yiming Zhu, Yuanshen Huang, and Zhengji Ni "The investigation of thin film growth on the surface of sub-wave grating microstructure", Proc. SPIE 7279, Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration, 727917 (19 February 2009); https://doi.org/10.1117/12.822847
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