Carbon-based micro/nano materials and structures such as carbon nanofibers (CNFs) and carbon nanotubes (CNTs)
have attracted a wide spread attention and been widely studied since it was invented because of its excellent electrical
properties, remarkable mechanical strength, thermal conductivity, chemical inertness and special optical properties.
However, it still remains a crucial problem in applying and characterizing of carbon-based micro/nano optoelectronic
devices, since it is difficult to realize interconnection of these micro/nanostructures such as CNTs for device integration.
Recently, it was reported that CNFs and CNTs can be fabricated and integrated with 3-dimensional carbon electrodes
through modified photolithography and pyrolyzed process. Following this work, a novel approach is introduced to
fabricate suspended micro/nano wires between electrodes which can be a promising method as interconnects for CNTbased
This paper briefly presents the process, experimental results and discussions for fabrication of suspended 3-dimensional
carbon interconnects. By dispersion of special nanoparticles with thick film SU-8 photoresist, suspended carbon
interconnects can be obtained between 3-dimensional adjacent carbon posts during photolithography process with
masking effect. Then, further work can be continued with fabrication of CNTs or CNFs over the structures through
controlled pyrolysis process.