6 March 2009 Microstructure fabrication on glasses for microfluidics
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Abstract
Micro-channels were fabricated in sodalime glass through imprinting, and then joined to a glass slab by thermal assisted direct bonding (TADB). These techniques are simple and low cost, suitable for mass production of micro-fluidic devices. The joined samples were characterized before and after TADB by optical microscopy, profilometer, SEM, shear strength test and Vickers hardness test. The integrity of channels is maintained also after the TADB. The interface between the two glass slabs was found to be without impurities, bubbles and cracks. The bonding strength was also measured to be 31.94MPa.
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Qiuping Chen, Qiuping Chen, Qiuling Chen, Qiuling Chen, Guihua Liao, Guihua Liao, Daniel Milanese, Daniel Milanese, } "Microstructure fabrication on glasses for microfluidics", Proc. SPIE 7280, Seventh International Conference on Photonics and Imaging in Biology and Medicine, 72800B (6 March 2009); doi: 10.1117/12.821590; https://doi.org/10.1117/12.821590
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