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20 May 2009 Development of an ultraprecision three axis micromilling machine
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Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72820H (2009) https://doi.org/10.1117/12.830799
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China
Abstract
To meet the requirement for high efficiency machining of the ultra-precision, ultra-smooth micro structured optical surface, an ultra-precision three axes micro milling machine was developed. The overall size of the machine is 600mm×500mm×700mm and all the strokes of three axes are 75mm. To overcome nonlinearity that always exists in conventional servo mechanism driven by ball screw, permanent-magnet linear motor is used to directly drive the aerostatic bearing slide. Linear encoder with 1.2 nm resolution was used as the feedback of position to buildup closed loop control system. The open architected CNC system is composed of the high performance embedded PMAC motion control card and standard industrial PC, and the control algorithm is based on "PID + velocity/acceleration feed forward + notch filter" strategy. Test results indicate that the positioning accuracy of all the three axes is less than ±0.25μm, and the repetitive positioning accuracy is less than ±0.2μm. The machine is proved to achieve nanometer scale through step response and sinusoidal signal track. The preparatory milling experiments with micro cemented carbide milling cutter further proves the processing capacity.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peng Zhang, Bo Wang, and Yingchun Liang "Development of an ultraprecision three axis micromilling machine", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820H (20 May 2009); https://doi.org/10.1117/12.830799
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