21 May 2009 Study on the methods for ensuring the precision of an x-ray microscope
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Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72822N (2009) https://doi.org/10.1117/12.830993
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China
Abstract
In the latest 20 years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by materials, it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In order to ensure the tolerances of KBA, we take many measures to ensure the high requirements during the installation and adjustment process.
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Lingling Zhao, Lingling Zhao, Delin Sun, Delin Sun, Peng Liu, Peng Liu, Jiasheng Hu, Jiasheng Hu, } "Study on the methods for ensuring the precision of an x-ray microscope", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72822N (21 May 2009); doi: 10.1117/12.830993; https://doi.org/10.1117/12.830993
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