21 May 2009 Studies on PZT membrane resonant gas sensors
Author Affiliations +
Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72823G (2009) https://doi.org/10.1117/12.831037
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China
Abstract
This paper presents a piezoelectric micro-bridge structure as a resonant gas sensor. The proposed micro-sensor is designed to expand the narrow range of frequency changing and make correction convenient for detection. The mechanical performance was simulated to obtain optimum design parameters by finite element method. The relationship between dimensions, layer thickness and resonance frequency is discussed. The results show that resonance frequency increased by about 0.6 MHz with a 8.25e-16 kg mass rise in gas-sensing layer in the frequency range of 8 GHz to 8.5 GHz. Thus, the sensor is very sensitive to the change of membrane mass and this makes it very suitable for concentration sensitive detector. Finally the fabrication process for the sensor suitable for batch fabrication is proposed.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenjing Zhao, Xuesheng Li, Liangfeng Xu, Jun Yao, Limei Xu, Yi Ma, "Studies on PZT membrane resonant gas sensors", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72823G (21 May 2009); doi: 10.1117/12.831037; https://doi.org/10.1117/12.831037
PROCEEDINGS
6 PAGES


SHARE
Back to Top