Studies on PZT membrane resonant gas sensors

Wenjing Zhao; Xuesheng Li; Liangfeng Xu; Jun Yao; Limei Xu; Yi Ma

doi:10.1117/12.831037

21 May 2009 Studies on PZT membrane resonant gas sensors

Wenjing Zhao, Xuesheng Li, Liangfeng Xu, Jun Yao, Limei Xu, Yi Ma

Author Affiliations +

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72823G (2009) https://doi.org/10.1117/12.831037
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

This paper presents a piezoelectric micro-bridge structure as a resonant gas sensor. The proposed micro-sensor is designed to expand the narrow range of frequency changing and make correction convenient for detection. The mechanical performance was simulated to obtain optimum design parameters by finite element method. The relationship between dimensions, layer thickness and resonance frequency is discussed. The results show that resonance frequency increased by about 0.6 MHz with a 8.25e-16 kg mass rise in gas-sensing layer in the frequency range of 8 GHz to 8.5 GHz. Thus, the sensor is very sensitive to the change of membrane mass and this makes it very suitable for concentration sensitive detector. Finally the fabrication process for the sensor suitable for batch fabrication is proposed.

Citation Download Citation

Wenjing Zhao, Xuesheng Li, Liangfeng Xu, Jun Yao, Limei Xu, and Yi Ma "Studies on PZT membrane resonant gas sensors", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72823G (21 May 2009); https://doi.org/10.1117/12.831037

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