20 May 2009 Large field F-θ laser scanning system
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Abstract
A large field laser scanning system is designed for PID imaging system. According to different deflectors, scanning system methods have optical lens scanning system, polygon mirror scanning system, acousto-optic scanning system and holographic scanning method. To realize large field scanning, a polygon mirror is used as scanner, which has high scanning speed, high resolution and contrast, good gamma characteristic and F-θ lens system is used as focusing system in type of scanner before lens. F-θ lens is special lens with linear scanning characteristic. F-θ lens can focus laser beam and make linear scanning. The scanning performance of F-θ lens is usually decided by its focusing characteristics. Designed system can scan object in 356mm length and the resolution achieves 35μm. Ball bearing guide screw system is used to realize scanning in Y direction, the scanning length can be set according to request. Thus, the system can make two dimensional scanning. By evaluating performance of optical system, the system focusing characteristics had achieved the diffraction limit in entire field and satisfies the system's requests. Experiment has been carried on to test the F-θ optical focusing system. The experimental results show that diameters of focusing facular at all view field are approximately 35μm, which is identical with theoretical parameter and conforms to F-θ characteristic.
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Baozhong Shan, Baozhong Shan, Baoping Guo, Baoping Guo, Hanben Niu, Hanben Niu, } "Large field F-θ laser scanning system", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 728312 (20 May 2009); doi: 10.1117/12.828629; https://doi.org/10.1117/12.828629
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