20 May 2009 Study on control structure analysis and optimization of high-precision measurement platform for optical aspheric surface
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Abstract
Taking high generality and efficiency into account, this paper presents a measurement and control means based on high-precision measurement platform including high-precision linear motors, contact and non-contact measurement sensor of 0.1um resolution and a new developed measuring software. This platform aims to achieve high-precision measurement for all kinds of optical aspheric workpieces for detection accuracy of 2um/200*200mm. In this paper, a measurement platform which consists of granite gantry framework, 3 axes linear motors, circle grating rotary encoder, grating linear scales, 4 axes motion control card, linear motion ball guide, contacting and non-contacting measurement sensor and so on, is designed and implemented. Through finite element stress analysis, it can find that the framework well fulfills the accuracy demand. And the performance comparison between linear motors and piezoelectric ceramics motors is then discussed. Further, it also compares the coordinated motion of "circle grating rotary encoder+2 axes linear motors" with the coordinated motion of "3 axes linear motors" to find out the difference in measurement accuracy by experiment data. Here, a better scheme for kinematic locus planning is proposed for making sure all axes have better dynamic characteristics. Aiming at various characteristics of optical workpieces, the different measurement paths are also provided. Finally, the experiments for this purpose are done to validate the measurement platform accuracy.
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Xiaolong Ke, Xiaolong Ke, Yinbiao Guo, Yinbiao Guo, Zhengzhong Wang, Zhengzhong Wang, Jianchun Liu, Jianchun Liu, } "Study on control structure analysis and optimization of high-precision measurement platform for optical aspheric surface", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831A (20 May 2009); doi: 10.1117/12.828658; https://doi.org/10.1117/12.828658
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